US-20260130154-A1 - DETACHABLE PURIFIER AND SUPPLY SYSTEM COMPRISING THE SAME

Abstract

A detachable purifier includes a compressor configured to pressurize a fluid, a buffer tank connected to the compressor, and configured to store the fluid, a particle filter connected to the buffer tank and configured to filter impurities in the fluid when the fluid passes through the particle filter; a dehumidifying filter connected to the buffer tank and configured to filter moisture within the fluid when the fluid passes through the dehumidifying filter; a first inlet pipe connected to the compressor and having a first removable connector for connection to a supply flow path; and a discharge pipe connected to the dehumidifying filter and having a second removable connector for connection to the supply flow path, and wherein the buffer tank is provided between the particle filter and the dehumidifying filter.

Inventors

• Jihwan Noh
• Samjong Choi
• Jungwon Kim
• Yigil CHO
• Sunghyeon PARK
• BUMSHIK KIM
• Yunho Kim
• SeongBin Park
• Jihong PARK
• Junsang YUN

Assignees

• SAMSUNG ELECTRONICS CO., LTD.

Dates

Publication Date

20260507

Application Date

20251017

Priority Date

20241021

Claims (20)

1. 1 . A detachable purifier comprising: a compressor configured to pressurize a fluid; a buffer tank connected to the compressor and configured to store the fluid; a particle filter connected to the buffer tank and configured to filter impurities in the fluid when the fluid passes through the particle filter; a dehumidifying filter connected to the buffer tank and configured to filter moisture within the fluid when the fluid passes through the dehumidifying filter; a first inlet pipe connected to the compressor and having a first connector removably connecting to a supply flow path; and a discharge pipe connected to the dehumidifying filter and having a second connector for removably connecting to the supply flow path, and wherein the buffer tank is provided between the particle filter and the dehumidifying filter.
2. 2 . The detachable purifier of claim 1 , wherein the dehumidifying filter is located downstream of the buffer tank.
3. 3 . The detachable purifier of claim 2 , wherein the particle filter is provided between the compressor and the buffer tank.
4. 4 . The detachable purifier of claim 3 , wherein the particle filter is located downstream of the compressor and upstream of the buffer tank.
5. 5 . The detachable purifier of claim 1 , further comprising: a separator connected to the first inlet pipe and configured to separate a secondary material from the fluid; and a separation pipe configured to discharge the secondary material separated by the separator.
6. 6 . The detachable purifier of claim 1 , further comprising: a first outlet pipe branched from the first inlet pipe; and an outlet valve configured to control flow rate of the first outlet pipe.
7. 7 . The detachable purifier of claim 1 , wherein the compressor configured to pressurize the fluid using a diaphragm type compressor.
8. 8 . The detachable purifier of claim 7 , further comprising: a second inlet pipe connected to the compressor and configured to provide a driving fluid to the compressor to drive the compressor; and a second outlet pipe configured to receive the driving fluid discharged from the compressor.
9. 9 . The detachable purifier of claim 1 , further comprising: a frame having a plurality of casters.
10. 10 . A supply system comprising: a supply pipe configured to supply a fluid to the supply system; and a purifier configured to be detachably connected to the supply pipe; wherein the purifier comprises: a compressor configured to pressurize the fluid supplied by the supply pipe; a buffer tank connected to the compressor and configured to store the fluid pressurized by the compressor; a particle filter connected to the buffer tank and configured to filter out impurities in the fluid; and a dehumidifying filter connected to the buffer tank and configured to filter out moisture within the fluid, and wherein the buffer tank is provided between the particle filter and the dehumidifying filter.
11. 11 . The supply system of claim 10 , wherein the supply pipe is a first supply pipe of a plurality of supply pipes, and the purifier is configured to be selectively connected to one of the plurality of the supply pipes.
12. 12 . The supply system of claim 10 , further comprising: a main purifier provided on the supply pipe and configured to purify the fluid, wherein the purifier is configured to be connected in a loop with the main purifier.
13. 13 . The supply system of claim 12 , wherein the purifier further comprises: a first inlet pipe connected to the compressor, and configured to be connected to the supply pipe; and a discharge pipe connected to the dehumidifying filter, and configured to be connected to the supply pipe, and the first inlet pipe is configured to be connected to a first connecting portion located downstream of the main purifier, and the discharge pipe is configured to be connected to a second connecting portion located upstream of the main purifier.
14. 14 . The supply system of claim 13 , further comprising: a filtering device configured to be connected to the supply pipe and configured to filter a portion of the fluid supplied from a supply source, and wherein the first connecting portion is located between the filtering device and the main purifier.
15. 15 . The supply system of claim 13 , further comprising: an analysis device configured to analyze the fluid supplied from a supply source, wherein the purifier is located downstream of the analysis device.
16. 16 . The supply system of claim 13 , further comprising: a main emission pipe connected to the supply pipe, wherein the purifier further comprises: a second inlet pipe connected to the compressor, and configured to provide a driving fluid to flow into the compressor; and a second outlet pipe configured to discharge the driving fluid from the compressor, and the second outlet pipe is configured to be connected to the main emission pipe.
17. 17 . The supply system of claim 16 , wherein the purifier further comprises: a first outlet pipe branched from the first inlet pipe; and an outlet valve configured to control flow rate of the first outlet pipe, and the first outlet pipe is configured to be connected to the main emission pipe.
18. 18 . The supply system of claim 10 , wherein the dehumidifying filter is located downstream of the buffer tank.
19. 19 . The supply system of claim 18 , wherein the particle filter is provided between the compressor and the buffer tank.
20. 20 . A method of recovering process fluid comprising: providing a fluid at an initial pressure to an inlet of a semiconductor manufacturing process apparatus from an upstream fluid supply; performing a process by the semiconductor manufacturing process apparatus using the fluid and outputting used fluid from an outlet of the semiconductor manufacturing process apparatus; redirecting the used fluid output from the outlet of the semiconductor manufacturing process apparatus to an inlet pipe of a mobile purifier to introduce the used fluid into the mobile purifier; compressing the used fluid with the mobile purifier to a return pressure that is greater than the initial pressure of the fluid to produce a purified fluid; and returning purified fluid to the inlet of the semiconductor manufacturing process apparatus.

Description

CROSS-REFERENCE TO RELATED APPLICATION(S) This U.S. non-provisional application claims priority under 35 USC § 119 to Korean Patent Application No. 10-2024-0144358, filed on Oct. 21, 2024, in the Korean Intellectual Property Office, the disclosure of which is herein incorporated by reference in its entirety. BACKGROUND Various materials are used in a semiconductor fabrication plant to manufacture semiconductors. As some of materials are essential materials to manufacture semiconductors, their usage increases continually every year. However, some essential materials have limited production worldwide, and the limited production is concentrated in some countries. Therefore, there are problems such as increased costs for securing the essential materials and decreased supply stability. Accordingly, various studies are being conducted to reduce the usage of the essential materials during semiconductor manufacturing process and to recycle the essential materials used. SUMMARY Example embodiments of the present disclosure provide a detachable purifier which can be coupled to and detached from a supply pipe in a semiconductor fabrication plant and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier which is compact and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier which can be moved in the semiconductor fabrication plant and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier which can selectively be coupled to one of a plurality of supply pipes and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier and a supply system comprising the same, with reduced power consumption. Example embodiments of the present disclosure provide a detachable purifier with improved purification performance and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier with improved durability and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier which can be utilized together with existing equipment within the fabrication plant and a supply system comprising the same. Example embodiments of the present disclosure provide a detachable purifier which can flexibly respond to and be applied to changes in production materials, production volume, or production facilities and a supply system comprising the same. According to an example embodiment, a detachable purifier includes a compressor configured to pressurize a fluid, a buffer tank connected to the compressor and configured to store the fluid, a particle filter connected to the buffer tank and configured to filter impurities in the fluid when the fluid passes through the particle filter, and a dehumidifying filter connected to the buffer tank and configured to filter moisture within the fluid when the fluid passes through the dehumidifying filter; a first inlet pipe connected to the compressor and having a first r connector for removably connecting to a supply flow path; and a discharge pipe connected to the dehumidifying filter and having a second connector for removably connecting to the supply flow path, and wherein the buffer tank is provided between the particle filter and the dehumidifying filter. According to an example embodiment, a supply system includes a supply pipe configured supply a fluid to the supply system, and a purifier configured to be detachably connected to the supply pipe, wherein the purifier comprises a compressor configured to pressurize the fluid supplied by the supply pipe, a buffer tank connected to the compressor and configured to store the fluid pressurized by the compressor, a particle filter connected to the buffer tank and configured to filter impurities in the fluid, and a dehumidifying connected to the buffer tank and configured to filter moisture within the fluid, and wherein the buffer tank is provided between the particle filter and the dehumidifying filter. According to an example embodiments, a method of recovering process fluid includes providing a fluid at an initial pressure to an inlet of a semiconductor manufacturing process apparatus from an upstream fluid supply; performing a process by the semiconductor manufacturing process apparatus using the fluid and outputting used fluid from an outlet of the semiconductor manufacturing process apparatus; redirecting the used fluid output from the outlet of the semiconductor manufacturing process apparatus to an inlet pipe of a mobile purifier to introduce the used fluid into the mobile purifier; compressing the used fluid with the mobile purifier to a return pressure that is greater than the initial pressure of the fluid to produce a purified fluid; and returning purified fluid to the inlet of the semiconductor manufacturing process apparatu