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WO-2026093653-A1 - CONFIGURATION OF BEAMS IN A MEMS RESONATOR HAVING COUPLED BEAMS RESONATING IN A LONGITUDINAL-EXTENSIONAL MODE

WO2026093653A1WO 2026093653 A1WO2026093653 A1WO 2026093653A1WO-2026093653-A1

Abstract

Herein is provided a resonator (100), comprising a resonating element (101), wherein the resonating element (101) comprises a plurality of non-rectangular resonating beam elements (101), the plurality of beam elements (101) being positioned adjacent to each other, wherein the adjacent beam elements are mechanically connected to each other by connection elements (102) and separated from each other by non-linear trenches (104) Herein is further provided an apparatus, such as a resonator array, comprising at least one resonator (100).

Inventors

  • VESTERINEN, HANNU
  • JAAKKOLA, ANTTI
  • KASAMATSU, Naofumi

Assignees

  • KYOCERA TECHNOLOGIES OY

Dates

Publication Date
20260507
Application Date
20251030
Priority Date
20241101

Claims (15)

  1. 1 . A resonator (100), comprising a resonating element (101), wherein the resonating element (101) comprises a plurality of non-rectangular resonating beam elements (101), the plurality of beam elements (101) being positioned adjacent to each other, wherein the adjacent beam elements are mechanically connected to each other by connection elements (102) and separated from each other by non-linear trenches (104).
  2. 2. The resonator (100) of claim 1 , wherein each non-linear trench (104) has a uniform width.
  3. 3. The resonator (100) of claim 1 or 2, wherein any two adjacent beam elements are different in shape with each other.
  4. 4. The resonator (100) of any preceding claim, wherein any two adjacent beam elements mirror each other in shape.
  5. 5. The resonator (100) of any preceding claim, wherein the non-linear trenches (104) have a bendy shape, matching the shape of the adjacent beam elements.
  6. 6. The resonator (100) of any preceding claim, wherein an edge of the resonating beam element has a shape of a wave, such as a sine-wave that creates beam width variation within the beam element.
  7. 7. The resonator of claim 6, wherein both opposing edges of the resonating beam element have a shape of a wave, wherein the waves of the opposing edges have opposing phases with one another.
  8. 8. The resonator (100) of any preceding claim, wherein the resonating beam elements are longitudinally aligned within 25 degrees of a <100> crystal direction of silicon.
  9. 9. The resonator (100) of any preceding claim, wherein the resonating element (101) comprises a top electrode layer (L1), a piezoelectric layer (L2), and a bottom electrode (L4), wherein the piezoelectric layer (L2) is beneath the top electrode layer (L1), and the bottom electrode (L4) on the opposite side of the piezoelectric layer (L2) than the top electrode layer (L1).
  10. 10. The resonator (100) of claim 9, wherein the bottom electrode (L4) comprises silicon, preferably doped silicon, such as ultra-heavily doped, UHD, silicon.
  11. 11. The resonator (100) of claim 9 or 10, wherein the top electrode layer (L1) comprises metal, preferably gold.
  12. 12. The resonator (100) of any preceding claim, wherein the resonating element (101) is configured to resonate in an in-plane length-extensional, LE, main resonance mode.
  13. 13. The resonator (100) of any preceding claim, wherein the resonating element (101) is configured to suppress spurious resonance mode(s).
  14. 14. The resonator (100) of claim 13, wherein the resonating element (101) comprises an in-plane width-extensional, WE, spurious resonance mode and/or an out-of-plane flexural spurious resonance mode.
  15. 15. An apparatus, such as a resonator array, comprising at least one resonator (100) according to any of claims 1-14.

Description

BEAM CONFIGURATION TECHNICAL FIELD The present disclosure generally relates to the field of semiconductors and semiconductor apparatuses. The disclosure relates particularly, though not exclusively, to beam configurations of resonators. BACKGROUND This section illustrates useful background information without admission of any technique described herein representative of the state of the art. A key performance parameter in semiconductor apparatuses, such as resonators, such as silicon MEMS resonators is the equivalent series resistance (ESR). ESR is inversely proportional to the quality factor Q of the apparatus. Typically, semiconductor apparatuses are configured to vibrate (oscillate) in a desired main resonance mode. In certain occasions, the apparatus may adopt another, unwanted resonance mode. The performance of the semiconductor apparatus is typically adversely affected by such unwanted resonance modes. SUMMARY The appended claims define the scope of protection. Any examples and technical descriptions of apparatuses, products and/or methods in the description and/or drawings not covered by the claims are presented not as embodiments of the invention but as background art or examples useful for understanding the invention. It is an object of certain embodiments of the present disclosure to provide a scheme to solve at least one of the problems related to the prior art, or at least to provide an alternative to existing technology. Accordingly, certain disclosed embodiments provide for an ingenious resonator solving at least one of the problems related to the prior art. According to a first example aspect of the present disclosure there is provided a resonator, comprising a resonating element, wherein the resonating element comprises a plurality of non-rectangular resonating beam elements, the plurality of beam elements being positioned adjacent to each other, wherein the adjacent beam elements are mechanically connected to each other by connection elements and separated from each other by non-linear trenches. In certain embodiments, the resonating beam elements are non-rectangular in shape. In certain embodiments, the resonating beam elements have non-rectangular shape. In certain embodiments, the resonating beam elements are non-rectangular in shape. In certain embodiments, a resonating beam element comprises width variation within the beam element (itself). In certain embodiments, each resonating beam element is non-rectangular in shape. In certain embodiments, each resonating beam element has non-rectangular shape. In certain embodiments, each resonating beam element is non-rectangular in shape. In certain embodiments, each resonating beam element comprises width variation within the beam element (itself). In certain embodiments, (any) two adjacent beam elements are different in shape with each other. In certain embodiments, (any) two adjacent beam elements differ in shape from one another. In certain embodiments, the resonating beam elements are non-rectangular elongated elements. In certain embodiments, the resonating beam elements are of triangle wave shaped. In certain embodiments, the resonating beam elements are of elliptical shape, an hourglass shape, a tapered shape, or a rotated hourglass shape. In certain embodiments, the adjacent beam elements have varied shapes (in comparison to the adjacent beam elements). In certain embodiments, the resonating beam element has (comprises) non-linear (nonstraight) edge(s). In certain embodiments, the resonating beam element has (comprises) sine-wave shaped edge(s). In certain embodiments, an edge (long edge, long side) of the resonating beam element has (comprises) a shape of wave, such as sine-wave that creates beam width variation within the beam element (itself). In certain embodiments, both opposing edges of the resonating beam element have (comprise) a shape of a wave, wherein the waves of the opposing edges have opposing phases with one another. In certain embodiments, in the embodiments of the both opposing edges having sine-wave shape, the sine-waves (of the opposite edges) are in opposite phases with respect to each other. In certain embodiments, both opposing edges of the resonating beam element have a shape of sine-wave (and said sine-waves oppose one another in phase) such that the beam element comprises width variation within itself. What is disclosed above for a sine-wave, is applicable also to other wave or bent shapes of beam element edges, such as waves other than sine-shaped, or triangle wave edges. In certain embodiments, the opposing edges of the resonating beam element have the same but opposing shapes with each other. In certain embodiments, the opposing edges of the resonating beam element have the same shape, such as a sine-wave of triangular wave shape, but in opposite (phase) with one another. In certain embodiments, the opposing edges of the resonating beam element have the same shape, but in opposite phase with one another