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WO-2026094431-A1 - SURFACE DETECTION SENSOR AND SURFACE INSPECTION DEVICE

WO2026094431A1WO 2026094431 A1WO2026094431 A1WO 2026094431A1WO-2026094431-A1

Abstract

A surface detection sensor (1) for detecting a protrusion (3a) present on a surface of an object (3) comprises: a sheet-shaped elastic member (10); a sheet-shaped covering member (20) located on the object (3) side during the use of the surface detection sensor (1); a plurality of electrodes (30) disposed between the elastic member (10) and the covering member (20); at least one detection line (41) located between the plurality of electrodes (30) and the covering member (20) and disposed to intersect the plurality of electrodes (30); and an insulating layer (42) located between each of the plurality of electrodes (30) and the detection line (41).

Inventors

  • MINAMIYAMA, Masanori
  • MATSUMOTO, TAKASHI
  • URAGAMI, SUSUMU
  • MITSUYASU, TOSHIO
  • SUZUKI, KATSUNOBU
  • HIGO, Takayuki

Assignees

  • パナソニックＩＰマネジメント株式会社

Dates

Publication Date
20260507
Application Date
20250909
Priority Date
20241028

Claims (12)

  1. A surface detection sensor that detects protrusions on the surface of an object, A sheet-like elastic member, When the surface detection sensor is used, a sheet-like covering member is located on the object side, A plurality of electrodes are disposed between the elastic member and the covering member, A detection line is located between the plurality of electrodes and the covering member and is arranged to intersect the plurality of electrodes, The system comprises an insulating layer located between each of the plurality of electrodes and the detection line, Surface detection sensor.
  2. The surface detection sensor detects protrusions present on the surface of the object by moving relative to the object in a first direction, The plurality of electrodes are arranged in at least a second direction perpendicular to the first direction. The surface detection sensor according to claim 1.
  3. The plurality of electrodes are also arranged in the first direction. The surface detection sensor according to claim 2.
  4. In a plan view, each of the plurality of electrodes has a first inclined portion that is inclined with respect to the first direction. The surface detection sensor according to claim 3.
  5. In a plan view, each of the plurality of electrodes further has a second inclined portion that is inclined with respect to the first direction and in a direction different from the inclination direction of the first inclined portion. The second inclined portion is formed in continuity with the first inclined portion. The surface detection sensor according to claim 4.
  6. The first inclined portion and the second inclined portion extend in a straight line or an arc shape. The surface detection sensor according to claim 5.
  7. The insulated coated wire comprises a core wire made of a conductive material and an insulating film covering the core wire, The detection line is the core wire, The insulating layer is the insulating film, A surface detection sensor according to any one of claims 1 to 6.
  8. Based on the change in capacitance between the plurality of electrodes and the detection line, a protrusion present on the surface of the object is detected. A surface detection sensor according to any one of claims 1 to 6.
  9. The elastic member is provided over the entirety of the plurality of electrodes. A surface detection sensor according to any one of claims 1 to 6.
  10. Each of the plurality of electrodes has a first conductive layer and a second conductive layer laminated on a part of the first conductive layer. The second conductive layer is located between the first conductive layer and the elastic member. The resistivity of the second conductive layer is lower than the resistivity of the first conductive layer. A surface detection sensor according to any one of claims 1 to 6.
  11. Furthermore, it includes at least one of an acceleration sensor, an angle sensor, and an angular velocity sensor. A surface detection sensor according to any one of claims 1 to 6.
  12. A surface detection sensor according to any one of claims 1 to 6, A fixing member for fixing the surface detection sensor, The system comprises a cushioning member disposed between the surface detection sensor and the fixing member. Surface inspection device.

Description

Surface detection sensor and surface inspection device This disclosure relates to a surface detection sensor for detecting protrusions on the surface of an object, and a surface inspection apparatus equipped with the surface detection sensor. Conventionally, techniques for non-contact inspection of the surface condition of an object using non-contact sensors such as optical sensors are known (for example, Patent Document 1). For example, when inspecting the surface condition of an object using an optical sensor, a laser beam is shone onto the object's surface, and the reflected light from the object's surface is received and analyzed. Figure 1 is a plan view of the surface detection sensor according to Embodiment 1, when the covering member is omitted, as seen from the covering member side.Figure 2 is a cross-sectional view of the surface detection sensor according to Embodiment 1, along the line II-II in Figure 1.Figure 3 is an enlarged cross-sectional view of the surface inspection apparatus according to Embodiment 1.Figure 4 is a diagram illustrating a method for inspecting the surface of an object using the surface inspection apparatus according to Embodiment 1.Figure 5 shows how a surface inspection device overcomes protrusions on the surface of an object.Figure 6 is a plan view of the surface detection sensor according to Embodiment 2, when the covering member is omitted, as seen from the covering member side.Figure 7 is a cross-sectional view of the surface detection sensor according to Embodiment 2 along the line VII-VII in Figure 6.Figure 8 is an enlarged cross-sectional view of a modified surface inspection device. The embodiments of this disclosure will be described below with reference to the drawings. The embodiments described below are all specific examples of this disclosure. Therefore, the numerical values, shapes, materials, components, arrangement and connection configurations of components, and processes (steps) and their order shown in the following embodiments are examples and are not intended to limit this disclosure. Accordingly, components in the following embodiments that are not described in the independent claims representing the highest-level concepts of this disclosure will be described as optional components. The figures are schematic and not necessarily strictly accurate. Therefore, the scale and other aspects may not necessarily match in each figure. Furthermore, the same reference numerals are used for substantially identical components in each figure, and redundant explanations are omitted or simplified. In each figure, the X, Y, and Z axes represent the three axes of a three-dimensional Cartesian coordinate system. In this embodiment, the Z-axis direction is defined as the vertical direction, and the direction perpendicular to the Z-axis (parallel to the XY plane) is defined as the horizontal direction. The X and Y axes are mutually orthogonal and both are perpendicular to the Z-axis. In this specification, the terms "up" and "down" do not necessarily refer to the absolute upward (vertically upward) and downward (vertically downward) directions in spatial perception. (Embodiment 1) First, the configuration of the surface detection sensor 1 according to Embodiment 1 will be explained using Figures 1 and 2. Figure 1 is a plan view of the surface detection sensor 1 according to Embodiment 1, when the covering member 20 is omitted, as seen from the covering member 20 side. Figure 2 is a cross-sectional view of the surface detection sensor 1 according to Embodiment 1 along the line II-II in Figure 1. The surface detection sensor 1 is a contact-type sensor that inspects the surface of an object (subject) by making contact with it. Specifically, the surface detection sensor 1 detects protrusions on the surface of the object by moving relative to the object in a predetermined direction, a first direction (the X-axis direction in this embodiment). Furthermore, the surface detection sensor 1 is a thin, sheet-like sensor. As shown in Figures 1 and 2, the surface detection sensor 1 comprises an elastic member 10, a covering member 20, a plurality of electrodes 30, and a plurality of wires 40. As shown in Figure 2, the plurality of electrodes 30 and the plurality of wires 40 are arranged between the elastic member 10 and the covering member 20. The elastic member 10 is a sheet-like sheet member. Specifically, the elastic member 10 is a flat sheet member with a uniform thickness. The planar shape of the elastic member 10 is, for example, rectangular, but is not limited to this. The elastic member 10 is an elastic body that exhibits elastic deformation. Specifically, the elastic member 10 is a rubber body made of rubber material and possesses rubber elasticity. In this embodiment, the elastic member 10 is made of ethylene propylene diene rubber (EPDM). Alternatively, the elastic member 10 may be made of an elastomer. In this case, EPDM elastomer can be used as the material for the elasti