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WO-2026094705-A1 - MACHINE TOOL

WO2026094705A1WO 2026094705 A1WO2026094705 A1WO 2026094705A1WO-2026094705-A1

Abstract

A machine tool (100) is provided with: a manual pulse generator (50) for manually controlling a feed shaft that moves a main shaft (112) and a table (106) relative to one another; an imaging device (30) that can be attached to the main shaft of the machine tool, for capturing an image of the surface of a workpiece (W) fixed to the table; a display device (28) for displaying the image of the surface of the workpiece (W) captured by the imaging device; and a processing unit (12) for extracting a measurement target from image data of the surface of the workpiece captured by the imaging device and obtaining, by calculation, the coordinates of the measurement target. The processing unit obtains the coordinate values of a reference point of the measurement target from the image data of the surface of the workpiece captured by the imaging device attached to the main shaft, which has been positioned relative to the table by the manual pulse generator such that the center (Om) of the measurement target is disposed substantially at the center (Oc) of the image of the surface of the workpiece displayed on the display device.

Inventors

  • HEISHI, Hideki
  • FURUTA, Megumi
  • HIRASHIMA, Junya
  • KOURA, Taiyo

Assignees

  • 株式会社牧野フライス製作所

Dates

Publication Date
20260507
Application Date
20251021
Priority Date
20241101

Claims (4)

  1. The spindle on which the tool is attached, A table facing the aforementioned spindle and on which the workpiece is mounted, A feed axis that moves the spindle and the table relative to each other, An imaging device that can be attached to the spindle of a machine tool and images the surface of a workpiece fixed to the table, A display device that displays an image of the surface of the workpiece captured by the aforementioned imaging device, A processing unit that extracts the object to be measured from the image data of the surface of the workpiece captured by the imaging device and calculates the coordinate values of the reference point of the object to be measured, It is equipped with, The aforementioned processing unit, A machine tool characterized in that, when the center of the object to be measured is positioned relative to the table at a temporary position within the range of the image of the work surface displayed on the display device, the processing unit determines the position of the reference point of the object to be measured on the image data of the work surface captured by the imaging device attached to the spindle, moves the feed axis relative to the image data so that the measurement point of the object to be measured becomes the center position of the image captured by the imaging device, and measures the coordinate value of the feed axis as the coordinate value of the reference point of the object to be measured.
  2. The processing unit further stores the coordinate values of the reference point of the measurement target obtained in the data storage unit. The machine tool according to claim 1, wherein after the workpiece is replaced with a new workpiece, the coordinate values of the object to be measured are read from the data storage unit, a measurement program is generated using the coordinate values as the temporary position of the new workpiece, and the new workpiece is measured according to the measurement program.
  3. The object to be measured is a hole formed in the workpiece, a circular alignment mark provided on the surface of the workpiece, or the edge of the workpiece. The system further comprises a manual control unit for the operator to control the feed axis in manual operation mode, The machine tool according to claim 1, wherein the positioning to the temporary position is performed by a manual operation unit.
  4. The machine tool according to claim 1, wherein the object to be measured is an alignment mark of any shape provided on the surface of the workpiece.

Description

machine tools This invention relates to a machine tool capable of measuring the position of a workpiece on the machine. Patent Document 1 describes a machine tool in which an image measuring head device is attached to the spindle, and image measurements such as edge detection and circle measurement are performed from image data captured by the image measuring head device. This is a schematic diagram showing an example of a machine tool according to the present invention.This is a schematic block diagram showing an example of a workpiece measuring device.This is a flowchart showing the workpiece measurement method.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram illustrating the alignment between the center of the image and the center of the non-circular alignment mark.This is a schematic diagram illustrating the alignment between the center of the image and the center of the non-circular alignment mark.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram of the screen displayed on the display unit.This is a schematic diagram illustrating a measurement method when a workpiece has multiple non-circular alignment marks.This is a schematic diagram illustrating a measurement method when a workpiece has multiple non-circular alignment marks.This is a schematic diagram illustrating a measurement method when a workpiece has multiple non-circular alignment marks.This is a schematic diagram illustrating a measurement method when a workpiece has multiple non-circular alignment marks. Preferred embodiments of the present invention will be described below with reference to the attached drawings. Referring to Figure 1, an example of a machine tool to which the present invention is applied is shown. In Figure 1, a machine tool 100 according to a preferred embodiment of the present invention constitutes a vertical machining center and comprises a bed 102 as a base fixed to the floor of the factory, a table 106 mounted on the upper surface of the front portion of the bed 102 (left side in Figure 1) so as to be movable in the front-rear direction or in the Y-axis direction (left-right direction in Figure 1) and to which a workpiece W is fixed, a column 104 erected and fixed on the upper surface of the bed 102 at the rear end side of the bed 102 (right side in Figure 1), an X-axis slider 108 mounted on the front of the column 104 so as to be movable in the left-right direction or in the X-axis direction (direction perpendicular to the plane of the paper in Figure 1), and a spindle head 110 mounted on the front of the X-axis slider 108 so as to be movable in the up-down direction or in the Z-axis direction and to rotatably support the spindle 112. The machine tool 100 also comprises an operation panel 200 for an operator to operate the machine tool 100. The present invention is particularly advantageous for thin workpieces W, such as semiconductor wafers. A tool (not shown) for machining a workpiece W fixed to the table 106 can be mounted at the tip of the spindle 112. In Figure 1, instead of a tool, an imaging device 30 for measuring the workpiece W is mounted at the tip of the spindle 112. The imaging device 30 can be mounted manually by the operator of the machine tool 100, but preferably, it is automatically mounted to the tip of the spindle 112 by the machine tool 100's automatic tool changer 40 (Figure 2). The table 106 is mounted on the upper surface of the bed 102 so as to be reciprocable along a pair of Y-axis guide rails (not shown) extending horizontally in the Y-axis direction (left-right direction in Figure 1). The bed 102 is equipped with a Y-axis feed device that drives the table 106 to reciprocate along the Y-axis guide rails. This device includes a ball screw (not shown) extending in the Y-axis direction and a Y-axis servo motor My connected to one end of the ball screw. A nut (not shown) that engages with the ball screw is attached to the table 106. The table 106 is also equipped with a Y-axis scale 120 for measuring its position in the Y-axis direction. The X-axis slider 108 is mounted to reciprocate along a pair of X-axis guide rails