WO-2026095253-A1 - SLAB-SHAPED PULSE WIDTH COMPRESSION AND SPECTRAL LIGHT AMPLIFICATION DEVICE, AND FEMTOSECOND LASER SYSTEM INCLUDING SAME

WO2026095253A1WO 2026095253 A1WO2026095253 A1WO 2026095253A1WO-2026095253-A1

Abstract

The present disclosure may comprise: a first laser light source; a second laser light source; a diffraction grating for diffracting laser light generated from the first laser light source; a mirror for reflecting the diffracted laser light and transmitting line-shaped laser light generated from the second laser light source; and a slab-shaped crystal doped with a gain medium, which is positioned in an optical path between the diffraction grating and the mirror to amplify and equalize the spectrum of the diffracted laser light and the spectrum of the line-shaped laser light.

Inventors

KIM, HYUNG WOO
SEO, HONG SEOK
SONG, DONG HOON

Assignees

주식회사 블루타일랩

Dates

Publication Date: 20260507
Application Date: 20250626
Priority Date: 20241028

Claims (10)

First laser light source; Second laser light source; A diffraction grating that diffracts laser light generated from the first laser light source; A mirror that reflects the diffracted laser light and transmits the line-shaped laser light generated from the second laser light source; and A slab-shaped pulse width compression device comprising a crystal doped with a slab-shaped gain medium positioned in the optical path between the diffraction grating and the mirror, which amplifies and uniformizes the spectrum of the diffracted laser light and amplifies and uniformizes the spectrum of the line-shaped laser light.
In paragraph 1, A slab-shaped pulse width compression device further comprising at least one lens provided on the optical path of the mirror and the second laser light source and focusing the line-shaped laser light.
In paragraph 1, A slab-shaped pulse width compression device further comprising an attenuator provided on the optical path of the mirror and the third lens and attenuating the intensity of the line-shaped laser light.
In paragraph 1, The reflection band width of the above mirror is, A slab-shaped pulse width compression device having a bandwidth equal to or greater than the bandwidth of the diffracted laser light.
In paragraph 1, It further includes a third laser light source and a fourth laser light source arranged opposite each other to the crystal above, and A slab-shaped pulse width compression device that is pumped bidirectionally through line-shaped laser light generated from the third laser light source and the fourth laser light source.
In paragraph 5, A slab-shaped pulse width compression device further comprising at least one lens provided on the optical path of the third laser light source and the fourth laser light source and focusing the line-shaped laser light.
In paragraph 1, The reflectivity of the above mirror is controlled by an external device, and A slab-shaped pulse width compression device in which the reflectance is set differently according to the wavelength distribution of the diffracted laser light.
In paragraph 1, The above crystal is a slab-type pulse width compression device that amplifies laser light branched by wavelength.
In paragraph 1, A slab-shaped pulse width compression device in which the intensity of the above-mentioned line-shaped laser light is attenuated by an external device.
A femtosecond fiber laser system comprising a slab-type pulse width compression device as described in claim 1.

Description

SLAP-type pulse width compression and spectral optical amplification device, femtosecond laser system including the same The present disclosure relates to a laser system. More specifically, the present disclosure relates to a slab-type pulse width compression and spectral optical amplification device and a femtosecond laser system comprising the same. Generally, femtosecond laser light has been used in industrial settings to reduce cutting defects in semiconductor wafers and secondary battery electrodes. Here, the femtosecond laser light was modulated into a laser light having a high-energy pulse train, as well as having a repetition rate controlled by a pulse control signal. For example, laser light could be generated by a femtosecond fiber laser system. However, conventional femtosecond fiber laser systems could not efficiently amplify laser light because they could not make the spectrum of the laser light uniform when amplifying the spectrum of the laser light. Therefore, recently, there is a demand for the development of improved technology that can efficiently amplify laser light by making the laser light spectrum uniform. FIG. 1 is a diagram showing a femtosecond fiber laser system according to the present disclosure. Figure 2 is a diagram showing an example of the detailed configuration of the femtosecond fiber laser system of Figure 1. Figure 3 is a diagram showing the wavelength of the pulsed laser light of Figure 2, the wavelength of the first continuous wave laser light, and the wavelength of the second continuous wave laser light. FIGS. 4 to 7 are drawings showing an example of the configuration of a slab-type pulse width compression device of FIG. 2. Throughout this disclosure, the same reference numerals denote the same components. This disclosure does not describe all elements of the embodiments, and general content in the art to which this disclosure pertains or content that overlaps between embodiments is omitted. The terms 'part, module, component, block' as used in the specification may be implemented in software or hardware, and depending on the embodiments, a plurality of 'parts, modules, components, blocks' may be implemented as a single component, or a single 'part, module, component, block' may include a plurality of components. Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are directly connected but also cases where they are indirectly connected, and indirect connections include connections made via a wireless communication network. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Throughout the specification, when it is stated that a component is located "on" another component, this includes not only cases where a component is in contact with another component, but also cases where another component exists between the two components. Terms such as "first," "second," etc., are used to distinguish one component from another, and the components are not limited by the aforementioned terms. Singular expressions include plural expressions unless there is an obvious exception in the context. In each step, identification codes are used for convenience of explanation and do not describe the order of the steps; the steps may be performed differently from the specified order unless a specific order is clearly indicated in the context. The operating principles and embodiments of the present disclosure will be described below with reference to the attached drawings. FIG. 1 is a drawing showing a femtosecond fiber laser system according to the present disclosure. FIG. 2 is a drawing showing a detailed configuration of the femtosecond fiber laser system of FIG. 1 as an example. Figure 3 is a diagram showing the wavelength of the pulsed laser light of Figure 2, the wavelength of the first continuous wave laser light, and the wavelength of the second continuous wave laser light. Referring to FIGS. 1 to 3, a femtosecond fiber laser system (100) according to the present disclosure may include a femtosecond light source (10), a preamplifier (20), a pulse picker (30), a first continuous wave light source (40), a main amplifier (50), a slab-type pulse width compression device (60), a polarizing plate (65), a control module (70), and a second continuous wave light source (80). The femtosecond light source (10) can generate femtosecond laser light (12). Here, the femtosecond laser light (12) can have a frequency of about 10 MHz to about 1000 MHz. A preamplifier (20) can be connected to a femtosecond light source (10). Here, the preamplifier (20) can amplify femtosecond laser light (12). The pulse speaker (30) can be connected to a preamplifier (20). Here, the pulse speaker (30) can generate pulsed laser light (32) by modulating femtosecond laser light (12). Here, pu